Hoffmann-Urlaub, Sarah

[["dc.bibliographiccitation.firstpage","135"],["dc.bibliographiccitation.journal","Microelectronic Engineering"],["dc.bibliographiccitation.lastpage","138"],["dc.bibliographiccitation.volume","164"],["dc.contributor.author","Hoffmann-Urlaub, Sarah"],["dc.contributor.author","Hoehne, Philipp"],["dc.contributor.author","Kanbach, Mike"],["dc.contributor.author","Salditt, Tim"],["dc.date.accessioned","2017-09-07T11:44:34Z"],["dc.date.available","2017-09-07T11:44:34Z"],["dc.date.issued","2016"],["dc.description.abstract","This paper reports on the fabrication of X-ray waveguides, manufactured by e-beam lithography, reactive ion etching and wafer bonding techniques. By combination of these processing steps, long empty (air) channels with cross-sections in the range of 10 to 100 nm are obtained, forming a guiding layer, surrounded by a solid state cladding. Aside from silicon, we present also waveguide channels fabricated in germanium and quartz. The improved fabrication protocols lead to significantly enhanced exit flux for imaging applications. Finally, we address not only straight channels, but a large variety of various geometries, as required for different applications. (C) 2016 Elsevier B.V. All rights reserved."],["dc.identifier.doi","10.1016/j.mee.2016.07.010"],["dc.identifier.gro","3141608"],["dc.identifier.isi","000384855900022"],["dc.identifier.uri","https://resolver.sub.uni-goettingen.de/purl?gro-2/679"],["dc.notes.intern","WoS Import 2017-03-10 / Funder: Helmholtz Society [VH-VI-403]; DESY [P10]; ESRF [ID01, BM20]"],["dc.notes.status","final"],["dc.notes.submitter","PUB_WoS_Import"],["dc.relation.eissn","1873-5568"],["dc.relation.issn","0167-9317"],["dc.relation.orgunit","Institut für Röntgenphysik"],["dc.relation.workinggroup","RG Salditt (Structure of Biomolecular Assemblies and X-Ray Physics)"],["dc.subject.gro","x-ray optics"],["dc.title","Advances in fabrication of X-ray waveguides"],["dc.type","journal_article"],["dc.type.internalPublication","yes"],["dc.type.peerReviewed","yes"],["dc.type.subtype","original_ja"],["dspace.entity.type","Publication"]]

[["dc.bibliographiccitation.artnumber","884802"],["dc.bibliographiccitation.volume","8848"],["dc.contributor.author","Osterhoff, Markus"],["dc.contributor.author","Bartels, Matthias"],["dc.contributor.author","Döring, Florian"],["dc.contributor.author","Eberl, Christian"],["dc.contributor.author","Hoinkes, Thomas"],["dc.contributor.author","Hoffmann-Urlaub, Sarah"],["dc.contributor.author","Liese, Tobias"],["dc.contributor.author","Radisch, Volker"],["dc.contributor.author","Rauschenbeutel, Arno"],["dc.contributor.author","Robisch, Anna Lena"],["dc.contributor.author","Ruhlandt, Aike"],["dc.contributor.author","Schlenkrich, Felix"],["dc.contributor.author","Salditt, Tim"],["dc.contributor.author","Krebs, Hans Ulrich"],["dc.contributor.editor","Goto, Shunji"],["dc.contributor.editor","Morawe, Christian"],["dc.contributor.editor","Khounsary, Ali"],["dc.date.accessioned","2020-02-24T13:39:51Z"],["dc.date.available","2020-02-24T13:39:51Z"],["dc.date.issued","2013"],["dc.description.abstract","We present experiments carried out using a combined hard x-ray focusing set-up preserving the benefits of a large-aperture Kirckpatrick-Baez (KB) mirror system and a small focal length multilayer zone plane (MZP). The high gain KB mirrors produce a pre-focus of 400 nm × 200 nm; in their defocus, two MZP lenses of diameter of 1.6 μm and 3.7 μm have been placed, with focal lengths of 50 μm and 250 μm respectively. The lenses have been produced using pulsed laser deposition (PLD) and focused ion beam (FIB). Forward simulations including error models based on measured deviations, auto-correlation analysis and three-plane phase reconstruction support two-dimensional focus sizes of 4.3 nm × 4.7 nm (7:9 keV, W/Si)1 and 4.3 nm ×5.9 nm (13:8 keV, W/ZrO2), respectively."],["dc.identifier.doi","10.1117/12.2025389"],["dc.identifier.gro","3145113"],["dc.identifier.uri","https://resolver.sub.uni-goettingen.de/purl?gro-2/2814"],["dc.language.iso","en"],["dc.notes.intern","Crossref Import"],["dc.notes.status","final"],["dc.relation.conference","SPIE"],["dc.relation.crisseries","Proceedings of SPIE"],["dc.relation.eventend","2013-08-28"],["dc.relation.eventlocation","San Diego"],["dc.relation.eventstart","2013"],["dc.relation.isbn","978-0-8194-9698-0"],["dc.relation.ispartof","Advances in X-ray/EUV optics and components VIII"],["dc.relation.ispartofseries","Proceedings of SPIE; 8848"],["dc.relation.issn","0277-786X"],["dc.relation.orgunit","Institut für Röntgenphysik"],["dc.relation.workinggroup","RG Salditt (Structure of Biomolecular Assemblies and X-Ray Physics)"],["dc.subject.gro","x-ray optics"],["dc.title","Two-dimensional sub-5-nm hard x-ray focusing with MZP"],["dc.type","conference_paper"],["dc.type.internalPublication","yes"],["dc.type.peerReviewed","no"],["dspace.entity.type","Publication"]]

[["dc.bibliographiccitation.firstpage","515"],["dc.bibliographiccitation.issue","5"],["dc.bibliographiccitation.journal","Acta Crystallographica. Section A, Foundations and Advances"],["dc.bibliographiccitation.lastpage","522"],["dc.bibliographiccitation.volume","72"],["dc.contributor.author","Hoffmann-Urlaub, Sarah"],["dc.contributor.author","Salditt, Tim"],["dc.date.accessioned","2020-12-10T18:26:01Z"],["dc.date.available","2020-12-10T18:26:01Z"],["dc.date.issued","2016"],["dc.description.abstract","This paper reports on the fabrication and characterization of X-ray waveguide beamsplitters. The waveguide channels were manufactured by electron-beam lithography, reactive ion etching and wafer bonding techniques, with an empty (air) channel forming the guiding layer and silicon the cladding material. A focused synchrotron beam is efficiently coupled into the input channel. The beam is guided and split into two channels with a controlled (and tunable) distance at the exit of the waveguide chip. After free-space propagation and diffraction broadening, the two beams interfere and form a double-slit interference pattern in the far-field. From the recorded far-field, the near-field was reconstructed by a phase retrieval algorithm (error reduction), which was found to be extremely reliable for the two-channel setting. By numerical propagation methods, the reconstructed field was then propagated along the optical axis, to investigate the formation of the interference pattern from the two overlapping beams. Interestingly, phase vortices were observed and analysed."],["dc.identifier.doi","10.1107/S205327331601144X"],["dc.identifier.eissn","2053-2733"],["dc.identifier.gro","3141627"],["dc.identifier.isi","000383913000001"],["dc.identifier.pmid","27580200"],["dc.identifier.uri","https://resolver.sub.uni-goettingen.de/purl?gro-2/75915"],["dc.notes.intern","DOI Import GROB-354"],["dc.notes.status","final"],["dc.notes.submitter","PUB_WoS_Import"],["dc.relation.issn","2053-2733"],["dc.relation.orgunit","Institut für Röntgenphysik"],["dc.relation.workinggroup","RG Salditt (Structure of Biomolecular Assemblies and X-Ray Physics)"],["dc.subject.gro","x-ray optics"],["dc.title","Miniaturized beamsplitters realized by X-ray waveguides"],["dc.type","journal_article"],["dc.type.internalPublication","yes"],["dc.type.peerReviewed","yes"],["dc.type.subtype","original_ja"],["dspace.entity.type","Publication"]]