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Schlenkrich, Felix
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Schlenkrich, Felix
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Schlenkrich, Felix
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Schlenkrich, F.
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2013Journal Article Research Paper [["dc.bibliographiccitation.firstpage","19311"],["dc.bibliographiccitation.issue","16"],["dc.bibliographiccitation.journal","Optics Express"],["dc.bibliographiccitation.lastpage","19323"],["dc.bibliographiccitation.volume","21"],["dc.contributor.author","Döring, Florian"],["dc.contributor.author","Robisch, Anna-Lena"],["dc.contributor.author","Eberl, Christian"],["dc.contributor.author","Osterhoff, Markus"],["dc.contributor.author","Ruhlandt, Aike"],["dc.contributor.author","Liese, Tobias"],["dc.contributor.author","Schlenkrich, Felix"],["dc.contributor.author","Hoffmann, S."],["dc.contributor.author","Bartels, Matthias"],["dc.contributor.author","Salditt, Tim"],["dc.contributor.author","Krebs, Hans-Ulrich"],["dc.date.accessioned","2020-11-05T15:05:23Z"],["dc.date.available","2020-11-05T15:05:23Z"],["dc.date.issued","2013"],["dc.description.abstract","Compound optics such as lens systems can overcome the limitations concerning resolution, efficiency, or aberrations which fabrication constraints would impose on any single optical element. In this work we demonstrate unprecedented sub-5 nm point focusing of hard x-rays, based on the combination of a high gain Kirkpatrick-Baez (KB) mirror system and a high resolution W/Si multilayer zone plate (MZP) for ultra-short focal length f. The pre-focusing allows limiting the MZP radius to below 2 mu m, compatible with the required 5 nm structure width and essentially unlimited aspect ratios, provided by enabling fabrication technology based on pulsed laser deposition (PLD) and focused ion beam (FIB). (c) 2013 Optical Society of America"],["dc.identifier.doi","10.1364/OE.21.019311"],["dc.identifier.gro","3142308"],["dc.identifier.isi","000323049900072"],["dc.identifier.pmid","23938848"],["dc.identifier.uri","https://resolver.sub.uni-goettingen.de/purl?gro-2/68456"],["dc.language.iso","en"],["dc.notes.intern","DOI Import GROB-352.6"],["dc.notes.status","final"],["dc.notes.submitter","PUB_WoS_Import"],["dc.relation","SFB 755: Nanoscale Photonic Imaging"],["dc.relation.eissn","1094-4087"],["dc.relation.issn","1094-4087"],["dc.relation.orgunit","Institut für Materialphysik"],["dc.relation.orgunit","Institut für Röntgenphysik"],["dc.relation.workinggroup","RG Salditt (Structure of Biomolecular Assemblies and X-Ray Physics)"],["dc.subject.gro","x-ray optics"],["dc.title","Sub-5 nm hard x-ray point focusing by a combined Kirkpatrick-Baez mirror and multilayer zone plate"],["dc.type","journal_article"],["dc.type.internalPublication","yes"],["dc.type.peerReviewed","yes"],["dc.type.subtype","original_ja"],["dspace.entity.type","Publication"]]Details DOI PMID PMC WOS2013Conference Paper [["dc.bibliographiccitation.artnumber","884802"],["dc.bibliographiccitation.volume","8848"],["dc.contributor.author","Osterhoff, Markus"],["dc.contributor.author","Bartels, Matthias"],["dc.contributor.author","Döring, Florian"],["dc.contributor.author","Eberl, Christian"],["dc.contributor.author","Hoinkes, Thomas"],["dc.contributor.author","Hoffmann-Urlaub, Sarah"],["dc.contributor.author","Liese, Tobias"],["dc.contributor.author","Radisch, Volker"],["dc.contributor.author","Rauschenbeutel, Arno"],["dc.contributor.author","Robisch, Anna Lena"],["dc.contributor.author","Ruhlandt, Aike"],["dc.contributor.author","Schlenkrich, Felix"],["dc.contributor.author","Salditt, Tim"],["dc.contributor.author","Krebs, Hans Ulrich"],["dc.contributor.editor","Goto, Shunji"],["dc.contributor.editor","Morawe, Christian"],["dc.contributor.editor","Khounsary, Ali"],["dc.date.accessioned","2020-02-24T13:39:51Z"],["dc.date.available","2020-02-24T13:39:51Z"],["dc.date.issued","2013"],["dc.description.abstract","We present experiments carried out using a combined hard x-ray focusing set-up preserving the benefits of a large-aperture Kirckpatrick-Baez (KB) mirror system and a small focal length multilayer zone plane (MZP). The high gain KB mirrors produce a pre-focus of 400 nm × 200 nm; in their defocus, two MZP lenses of diameter of 1.6 μm and 3.7 μm have been placed, with focal lengths of 50 μm and 250 μm respectively. The lenses have been produced using pulsed laser deposition (PLD) and focused ion beam (FIB). Forward simulations including error models based on measured deviations, auto-correlation analysis and three-plane phase reconstruction support two-dimensional focus sizes of 4.3 nm × 4.7 nm (7:9 keV, W/Si)1 and 4.3 nm ×5.9 nm (13:8 keV, W/ZrO2), respectively."],["dc.identifier.doi","10.1117/12.2025389"],["dc.identifier.gro","3145113"],["dc.identifier.uri","https://resolver.sub.uni-goettingen.de/purl?gro-2/2814"],["dc.language.iso","en"],["dc.notes.intern","Crossref Import"],["dc.notes.status","final"],["dc.relation.conference","SPIE"],["dc.relation.crisseries","Proceedings of SPIE"],["dc.relation.eventend","2013-08-28"],["dc.relation.eventlocation","San Diego"],["dc.relation.eventstart","2013"],["dc.relation.isbn","978-0-8194-9698-0"],["dc.relation.ispartof","Advances in X-ray/EUV optics and components VIII"],["dc.relation.ispartofseries","Proceedings of SPIE; 8848"],["dc.relation.issn","0277-786X"],["dc.relation.orgunit","Institut für Röntgenphysik"],["dc.relation.workinggroup","RG Salditt (Structure of Biomolecular Assemblies and X-Ray Physics)"],["dc.subject.gro","x-ray optics"],["dc.title","Two-dimensional sub-5-nm hard x-ray focusing with MZP"],["dc.type","conference_paper"],["dc.type.internalPublication","yes"],["dc.type.peerReviewed","no"],["dspace.entity.type","Publication"]]Details DOI2014Journal Article Research Paper [["dc.bibliographiccitation.firstpage","638"],["dc.bibliographiccitation.journal","Applied Surface Science"],["dc.bibliographiccitation.lastpage","644"],["dc.bibliographiccitation.volume","307"],["dc.contributor.author","Eberl, Christian"],["dc.contributor.author","Döring, Florian"],["dc.contributor.author","Liese, Tobias"],["dc.contributor.author","Schlenkrich, Felix"],["dc.contributor.author","Roos, Burkhard"],["dc.contributor.author","Hahn, Matthias"],["dc.contributor.author","Hoinkes, Thomas"],["dc.contributor.author","Rauschenbeutel, Arno"],["dc.contributor.author","Osterhoff, Markus"],["dc.contributor.author","Salditt, Tim"],["dc.contributor.author","Krebs, Hans-Ulrich"],["dc.date.accessioned","2017-09-07T11:45:42Z"],["dc.date.available","2017-09-07T11:45:42Z"],["dc.date.issued","2014"],["dc.description.abstract","Recently, we demonstrated unprecedented sub-5 nm point focusing of hard X-rays (at 7.9 key) based on the combination of a high gain Kirkpatrick-Baez (KB) mirror system and a high resolution W/Si multilayer zone plate (MZP). This MZP was prepared by the combination of pulsed laser deposition (PLD) and focused ion beam (FIB). Despite the small focus size, the MZP's quality suffered from sufficient but comparatively low efficiency (2%). In this paper we discuss how to overcome limitations of MZP fabrication by PLD by investigating the material systems W/Si, WIZr02, and Ta205/Zr02. We give a detailed description on the optimization processes for the deposition of smooth multilayers with highly precise layer thicknesses on a rotating wire. Furthermore, we present our latest results regarding a Ta205/Zr02 MZP, which has been proven already to be a system of high potential in the very first experiments as the efficiency reached 6.9% (at 18 keV). 2014 Elsevier B.V. All rights reserved."],["dc.identifier.doi","10.1016/j.apsusc.2014.04.089"],["dc.identifier.gro","3142089"],["dc.identifier.isi","000336596700088"],["dc.identifier.uri","https://resolver.sub.uni-goettingen.de/purl?gro-2/4422"],["dc.language.iso","en"],["dc.notes.intern","WoS Import 2017-03-10 / Funder: Deutsche Forschungsgemeinschaft [SFB 755, SFB 1073]"],["dc.notes.status","final"],["dc.notes.submitter","PUB_WoS_Import"],["dc.relation","SFB 755: Nanoscale Photonic Imaging"],["dc.relation","SFB 1073: Kontrolle von Energiewandlung auf atomaren Skalen"],["dc.relation","SFB 1073 | Topical Area A | A02 Verständnis und Manipulation von Dissipationskanälen des Energietransports"],["dc.relation.eissn","1873-5584"],["dc.relation.issn","0169-4332"],["dc.relation.orgunit","Institut für Materialphysik"],["dc.relation.orgunit","Institut für Röntgenphysik"],["dc.relation.workinggroup","RG Salditt (Structure of Biomolecular Assemblies and X-Ray Physics)"],["dc.subject.gro","x-ray optics"],["dc.title","Fabrication of laser deposited high-quality multilayer zone plates for hard X-ray nanofocusing"],["dc.type","journal_article"],["dc.type.internalPublication","yes"],["dc.type.peerReviewed","yes"],["dc.type.subtype","original_ja"],["dspace.entity.type","Publication"]]Details DOI WOS