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Hahn, Matthias
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Hahn, Matthias
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Hahn, Matthias
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Hahn, M.
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2014Journal Article Research Paper [["dc.bibliographiccitation.firstpage","638"],["dc.bibliographiccitation.journal","Applied Surface Science"],["dc.bibliographiccitation.lastpage","644"],["dc.bibliographiccitation.volume","307"],["dc.contributor.author","Eberl, Christian"],["dc.contributor.author","Döring, Florian"],["dc.contributor.author","Liese, Tobias"],["dc.contributor.author","Schlenkrich, Felix"],["dc.contributor.author","Roos, Burkhard"],["dc.contributor.author","Hahn, Matthias"],["dc.contributor.author","Hoinkes, Thomas"],["dc.contributor.author","Rauschenbeutel, Arno"],["dc.contributor.author","Osterhoff, Markus"],["dc.contributor.author","Salditt, Tim"],["dc.contributor.author","Krebs, Hans-Ulrich"],["dc.date.accessioned","2017-09-07T11:45:42Z"],["dc.date.available","2017-09-07T11:45:42Z"],["dc.date.issued","2014"],["dc.description.abstract","Recently, we demonstrated unprecedented sub-5 nm point focusing of hard X-rays (at 7.9 key) based on the combination of a high gain Kirkpatrick-Baez (KB) mirror system and a high resolution W/Si multilayer zone plate (MZP). This MZP was prepared by the combination of pulsed laser deposition (PLD) and focused ion beam (FIB). Despite the small focus size, the MZP's quality suffered from sufficient but comparatively low efficiency (2%). In this paper we discuss how to overcome limitations of MZP fabrication by PLD by investigating the material systems W/Si, WIZr02, and Ta205/Zr02. We give a detailed description on the optimization processes for the deposition of smooth multilayers with highly precise layer thicknesses on a rotating wire. Furthermore, we present our latest results regarding a Ta205/Zr02 MZP, which has been proven already to be a system of high potential in the very first experiments as the efficiency reached 6.9% (at 18 keV). 2014 Elsevier B.V. All rights reserved."],["dc.identifier.doi","10.1016/j.apsusc.2014.04.089"],["dc.identifier.gro","3142089"],["dc.identifier.isi","000336596700088"],["dc.identifier.uri","https://resolver.sub.uni-goettingen.de/purl?gro-2/4422"],["dc.language.iso","en"],["dc.notes.intern","WoS Import 2017-03-10 / Funder: Deutsche Forschungsgemeinschaft [SFB 755, SFB 1073]"],["dc.notes.status","final"],["dc.notes.submitter","PUB_WoS_Import"],["dc.relation","SFB 755: Nanoscale Photonic Imaging"],["dc.relation","SFB 1073: Kontrolle von Energiewandlung auf atomaren Skalen"],["dc.relation","SFB 1073 | Topical Area A | A02 Verständnis und Manipulation von Dissipationskanälen des Energietransports"],["dc.relation.eissn","1873-5584"],["dc.relation.issn","0169-4332"],["dc.relation.orgunit","Institut für Materialphysik"],["dc.relation.orgunit","Institut für Röntgenphysik"],["dc.relation.workinggroup","RG Salditt (Structure of Biomolecular Assemblies and X-Ray Physics)"],["dc.subject.gro","x-ray optics"],["dc.title","Fabrication of laser deposited high-quality multilayer zone plates for hard X-ray nanofocusing"],["dc.type","journal_article"],["dc.type.internalPublication","yes"],["dc.type.peerReviewed","yes"],["dc.type.subtype","original_ja"],["dspace.entity.type","Publication"]]Details DOI WOS