Recent advances in use of atomic layer deposition and focused ion beams for fabrication of Fresnel zone plates for hard x-rays

Journal
X-ray nanoimaging: instruments and methods; 28 - 29 August 2013, San Diego, California, United States
Date Issued
2013
Author(s)
Keskinbora, Kahraman
Mayer, Marcel
Grévent, Corinne
Szeghalmi, Adriana V.
Knez, Mato
Weigand, Markus
Snigireva, Irina
Snigirev, Anatoly
Schütz, Gisela
DOI
10.1117/12.2027251