Rapid measurement of water vapour pressure at the saturation point using a new hybrid humidity sensor

A new hybrid humidity sensor comprising a conventional capacitance humidity sensor and a planar heating element is described. Owing to its short response time of only a few milliseconds, its great measuring accuracy, large measuring range, and simplicity in handling, the sensor is suitable for measuring water vapour partial pressure in gases with rapidly changing flow and direction, e.g. in ventilated patients in the fields of anaesthesia and intensive care medicine. The small dimensions permit measurements at almost any location within the ventilation system.