Largest possible deviations from stoichiometry transfer during pulsed laser deposition

One of the major advantages of pulsed laser deposition (PLD) is the ability to transfer complex multicomponent materials stoichiometrically from a target to the growing film on a substrate. Nevertheless, in some systems small deviations from stoichiometry were found. In this paper, we show that it is possible to grow homogeneous alloy films with concentrations over an unprecedented large range of 0-97 wt% W from a single W80Cu20 target by just varying the laser fluence and additionally tilting the substrate during deposition. This is probably the largest deviation from stoichiometry transfer possible in a binary system.